Kazuya Matsushita

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Koshi City, Kumamoto, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230056038
- Publication date Feb 23, 2023
- TOKYO ELECTRON LIMITED
- Kousei IDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEARLY MOVING MECHANISM AND METHOD OF SUPPRESSING PARTICLE SCATTE...
- Publication number 20230021035
- Publication date Jan 19, 2023
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS