Kazuya Takada

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Nagano-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and substrate fixing device
- Patent number 11,862,501
- Issue date Jan 2, 2024
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and base member for use in the same
- Patent number 10,026,634
- Issue date Jul 17, 2018
- Shinko Electric Industries Co., Ltd.
- Kazuya Takada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TRAY AND SUBSTRATE FIXING DEVICE
- Publication number 20240158916
- Publication date May 16, 2024
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
- Publication number 20220084866
- Publication date Mar 17, 2022
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND BASE MEMBER FOR USE IN THE SAME
- Publication number 20160118285
- Publication date Apr 28, 2016
- Shinko Electric Industries Co., Ltd.
- Kazuya Takada
- H01 - BASIC ELECTRIC ELEMENTS