Kazuya TAKAHASHI

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus, film forming method and heat insulating member
- Patent number 10,570,508
- Issue date Feb 25, 2020
- Tokyo Electron Limited
- Satoshi Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method
- Patent number 9,984,875
- Issue date May 29, 2018
- Tokyo Electron Limited
- Kazuya Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 9,966,256
- Issue date May 8, 2018
- Tokyo Electron Limited
- Satoshi Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon film forming method, thin film forming method and cross-sec...
- Patent number 9,758,865
- Issue date Sep 12, 2017
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous silicon crystallizing method, crystallized silicon film f...
- Patent number 9,540,743
- Issue date Jan 10, 2017
- Tokyo Electron Limited
- Kazuya Takahashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of vapor-diffusing impurities
- Patent number 9,478,423
- Issue date Oct 25, 2016
- Tokyo Electron Limited
- Kazuya Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trench filling method and processing apparatus
- Patent number 9,384,974
- Issue date Jul 5, 2016
- Tokyo Electron Limited
- Daisuke Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of vapor-diffusing impurities
- Patent number 9,171,722
- Issue date Oct 27, 2015
- Tokyo Electron Limited
- Kazuya Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impurity diffusion method, substrate processing apparatus, and meth...
- Patent number 8,906,792
- Issue date Dec 9, 2014
- Tokyo Electron Limited
- Kazuya Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD AND HEAT INSULATING MEMBER
- Publication number 20180179625
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Satoshi TAKAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20170243742
- Publication date Aug 24, 2017
- TOKYO ELECTRON LIMITED
- Kazuya TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Crystallizing Group IV Semiconductor, and Film Forming A...
- Publication number 20160244892
- Publication date Aug 25, 2016
- TOKYO ELECTRON LIMITED
- Kazuya TAKAHASHI
- C30 - CRYSTAL GROWTH
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20160071728
- Publication date Mar 10, 2016
- TOKYO ELECTRON LIMITED
- Satoshi TAKAGI
- C30 - CRYSTAL GROWTH
Information Patent Application
Amorphous Silicon Crystallizing Method, Crystallized Silicon Film F...
- Publication number 20150159295
- Publication date Jun 11, 2015
- TOKYO ELECTRON LIMITED
- Kazuya TAKAHASHI
- C30 - CRYSTAL GROWTH
Information Patent Application
Silicon Film Forming Method, Thin Film Forming Method and Cross-Sec...
- Publication number 20150037970
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRENCH FILLING METHOD AND PROCESSING APPARATUS
- Publication number 20140349468
- Publication date Nov 27, 2014
- TOKYO ELECTRON LIMITED
- Daisuke SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF VAPOR-DIFFUSING IMPURITIES
- Publication number 20140030879
- Publication date Jan 30, 2014
- TOKYO ELECTRON LIMITED
- Kazuya TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPURITY DIFFUSION METHOD, SUBSTRATE PROCESSING APPARATUS, AND METH...
- Publication number 20130288470
- Publication date Oct 31, 2013
- TOKYO ELECTRON LIMITED
- Kazuya TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS

Kazuya TAKAHASHI

Person

Patents Grantslast 30 patents

Film forming apparatus, film forming method and heat insulating member

Film forming method

Film forming method and film forming apparatus

Silicon film forming method, thin film forming method and cross-sec...

Amorphous silicon crystallizing method, crystallized silicon film f...

Method of vapor-diffusing impurities

Trench filling method and processing apparatus

Method of vapor-diffusing impurities

Impurity diffusion method, substrate processing apparatus, and meth...

Patents Applicationslast 30 patents

FILM FORMING APPARATUS, FILM FORMING METHOD AND HEAT INSULATING MEMBER

FILM FORMING METHOD

Method for Crystallizing Group IV Semiconductor, and Film Forming A...

FILM FORMING METHOD AND FILM FORMING APPARATUS

Amorphous Silicon Crystallizing Method, Crystallized Silicon Film F...

Silicon Film Forming Method, Thin Film Forming Method and Cross-Sec...

TRENCH FILLING METHOD AND PROCESSING APPARATUS

METHOD OF VAPOR-DIFFUSING IMPURITIES

IMPURITY DIFFUSION METHOD, SUBSTRATE PROCESSING APPARATUS, AND METH...