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Kazuya Tanaka

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  • Kawasaki, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Exposure apparatus
    • Patent number 5,075,718
    • Issue date Dec 24, 1991
    • Ushio Denki
    • Shigeru Suzuki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Apparatus for treating photoresists
    • Patent number 4,841,342
    • Issue date Jun 20, 1989
    • Ushio Denki
    • Shinji Suzuki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Photochemical vapor deposition apparatus
    • Patent number 4,525,381
    • Issue date Jun 25, 1985
    • Ushio Denki Kabushiki Kaisha
    • Kazuya Tanaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...