Kazuya Togashi

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor wafer inspection device and method
- Patent number 7,576,852
- Issue date Aug 18, 2009
- Sumco Tech XIV Corporation
- Fumi Nabeshima
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting semiconductor wafer
- Patent number 7,522,290
- Issue date Apr 21, 2009
- Sumco Tech XIV Corporation
- Fumi Nabeshima
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor wafer inspection device and method
- Publication number 20090040512
- Publication date Feb 12, 2009
- KOMATSU ELECTRONIC METALS CO., LTD.
- Fumi Nabeshima
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and Method for Inspecting Semiconductor Wafer
- Publication number 20070229815
- Publication date Oct 4, 2007
- Komatsu Electronic Metals Co., Ltd.
- Fumi Nabeshima
- G01 - MEASURING TESTING