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Kazuya TOMII
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Shirakawa-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for measuring DIC defect shape on silicon wafer and polishin...
Patent number
12,345,659
Issue date
Jul 1, 2025
Shin-Etsu Handotai Co., Ltd.
Kazuya Tomii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for determining defect region
Patent number
10,513,798
Issue date
Dec 24, 2019
Shin-Etsu Handotai Co., Ltd.
Kazuya Tomii
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
METHOD FOR MEASURING DIC DEFECT SHAPE ON SILICON WAFER AND POLISHIN...
Publication number
20230125000
Publication date
Apr 20, 2023
Shin-Etsu Handotai Co., Ltd.
Kazuya TOMII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DETERMINING DEFECT REGION
Publication number
20180312994
Publication date
Nov 1, 2018
Shin-Etsu Handotai Co., Ltd.
Kazuya TOMII
C30 - CRYSTAL GROWTH