Kazuya UOYAMA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Support information display method, maintenance support method of s...
- Patent number 9,810,905
- Issue date Nov 7, 2017
- Tokyo Electron Limited
- Toshiaki Kodama
- G02 - OPTICS
Information Patent Grant
Clean-room monitoring device and method for monitoring clean-room
- Patent number 9,704,367
- Issue date Jul 11, 2017
- Tokyo Electron Limited
- Atsushi Suzuki
- H04 - ELECTRIC COMMUNICATION TECHNIQUE

Patents Applicationslast 30 patents

Information Patent Application
DATA COLLECTION SYSTEM, DATA COLLECTION APPARATUS, DATA COLLECTION...
- Publication number 20230395411
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- G01 - MEASURING TESTING
Information Patent Application
FABRICATION EQUIPMENT MONITORING DEVICE AND MONITORING METHOD
- Publication number 20150201167
- Publication date Jul 16, 2015
- TOKYO ELECTRON LIMITED
- Kaname Yamaji
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Clean-Room Monitoring Device and Method for Monitoring Clean-Room
- Publication number 20150124092
- Publication date May 7, 2015
- TOKYO ELECTRON LIMITED
- Atsushi SUZUKI
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
SUPPORT INFORMATION DISPLAY METHOD, MAINTENANCE SUPPORT METHOD OF S...
- Publication number 20140240484
- Publication date Aug 28, 2014
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- G02 - OPTICS