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Kazuya Yano
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Prober for inspecting semiconductor devices formed on semiconductor...
Patent number
9,684,014
Issue date
Jun 20, 2017
Tokyo Electron Limited
Shuji Akiyama
G01 - MEASURING TESTING
Information
Patent Grant
Probe apparatus and wafer mounting table for probe apparatus
Patent number
9,523,711
Issue date
Dec 20, 2016
Tokyo Electron Limited
Kazuya Yano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Prober and needle-tip polishing device for probe card
Patent number
9,383,389
Issue date
Jul 5, 2016
Tokyo Electron Limited
Kazuya Yano
B24 - GRINDING POLISHING
Information
Patent Grant
Probe apparatus
Patent number
9,261,553
Issue date
Feb 16, 2016
Tokyo Electron Limited
Eiichi Shinohara
G01 - MEASURING TESTING
Information
Patent Grant
Probe apparatus and substrate transfer method
Patent number
8,726,748
Issue date
May 20, 2014
Tokyo Electron Limited
Tadashi Obikane
G01 - MEASURING TESTING
Information
Patent Grant
Mounting device
Patent number
8,113,084
Issue date
Feb 14, 2012
Tokyo Electron Limited
Kazuya Yano
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Mounting device
Patent number
7,963,513
Issue date
Jun 21, 2011
Tokyo Electron Limited
Hiroshi Shimoyama
G01 - MEASURING TESTING
Information
Patent Grant
Probe apparatus and method for measuring electrical characteristics...
Patent number
7,940,065
Issue date
May 10, 2011
Tokyo Electron Limited
Kazuya Yano
G01 - MEASURING TESTING
Information
Patent Grant
Each inspection units of a probe apparatus is provided with an imag...
Patent number
7,701,236
Issue date
Apr 20, 2010
Tokyo Electron Limited
Shuji Akiyama
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
PROBER
Publication number
20150226767
Publication date
Aug 13, 2015
TOKYO ELECTRON LIMITED
Shuji Akiyama
G01 - MEASURING TESTING
Information
Patent Application
PROBER AND NEEDLE-TIP POLISHING DEVICE FOR PROBE CARD
Publication number
20150204909
Publication date
Jul 23, 2015
TOKYO ELECTRON LIMITED
Kazuya Yano
G01 - MEASURING TESTING
Information
Patent Application
PROBE APPARATUS AND WAFER MOUNTING TABLE FOR PROBE APPARATUS
Publication number
20150145547
Publication date
May 28, 2015
TOKYO ELECTRON LIMITED
Kazuya Yano
G01 - MEASURING TESTING
Information
Patent Application
PROBE APPARATUS
Publication number
20150028907
Publication date
Jan 29, 2015
TOKYO ELECTRON LIMITED
Eiichi Shinohara
G01 - MEASURING TESTING
Information
Patent Application
PROBE APPARATUS AND SUBSTRATE TRANSFER METHOD
Publication number
20110107858
Publication date
May 12, 2011
TOKYO ELECTRON LIMITED
Tadashi Obikane
G01 - MEASURING TESTING
Information
Patent Application
PROBE APPARATUS, PROBING METHOD AND STORAGE MEDIUM
Publication number
20090195263
Publication date
Aug 6, 2009
TOKYO ELECTRON LIMITED
Kazuya Yano
G01 - MEASURING TESTING
Information
Patent Application
PROBE APPARATUS
Publication number
20080290886
Publication date
Nov 27, 2008
TOKYO ELECTRON LIMITED
Shuji Akiyama
G01 - MEASURING TESTING
Information
Patent Application
MOUNTING DEVICE
Publication number
20080184916
Publication date
Aug 7, 2008
TOKYO ELECTRON LIMITED
Kazuya YANO
G12 - INSTRUMENT DETAILS
Information
Patent Application
MOUNTING DEVICE
Publication number
20080187420
Publication date
Aug 7, 2008
TOKYO ELECTRON LIMITED
Hiroshi SHIMOYAMA
G01 - MEASURING TESTING