Kazuyoshi Matsuzaki

Person

Ibaraki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Learning device, inference device, and learned model
- Patent number 11,625,518
- Issue date Apr 11, 2023
- Tokyo Electron Limited
- Kosuke Yamamoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of manufacturing semiconductor device and method of forming...
- Patent number 10,734,221
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Taiki Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 10,643,839
- Issue date May 5, 2020
- Tokyo Electron Limited
- Ayuta Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control method
- Patent number 10,591,194
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Yasuharu Sasaki
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Temperature adjustment method using wet surface in a processing cha...
- Patent number 10,541,158
- Issue date Jan 21, 2020
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,121,680
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control apparatus, processing apparatus, and temperatur...
- Patent number 9,791,191
- Issue date Oct 17, 2017
- Tokyo Electron Limited
- Yasuharu Sasaki
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
- Patent number 9,252,001
- Issue date Feb 2, 2016
- Tokyo Electron Limited
- Ikuo Sawada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyance device and substrate processing system
- Patent number 9,165,810
- Issue date Oct 20, 2015
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication apparatus and temperature adjustment method
- Patent number 8,818,545
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Kazuyoshi Matsuzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
- Patent number 8,636,871
- Issue date Jan 28, 2014
- Tokyo Electron Limited
- Ikuo Sawada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LEARNING DEVICE, INFERENCE DEVICE, AND LEARNED MODEL
- Publication number 20220050943
- Publication date Feb 17, 2022
- Tokyo Electron Limited
- Kosuke YAMAMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF FORMING...
- Publication number 20190013195
- Publication date Jan 10, 2019
- TOKYO ELECTRON LIMITED
- Taiki KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180166298
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20180158671
- Publication date Jun 7, 2018
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY AND EXHAUST STRUCTURE
- Publication number 20180155830
- Publication date Jun 7, 2018
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROL METHOD
- Publication number 20180023871
- Publication date Jan 25, 2018
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE ADJUSTMENT METHOD
- Publication number 20170323811
- Publication date Nov 9, 2017
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYANCE DEVICE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20150125238
- Publication date May 7, 2015
- TOKYO ELECTRON LIMITED
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL APPARATUS, PROCESSING APPARATUS, AND TEMPERATUR...
- Publication number 20140345317
- Publication date Nov 27, 2014
- Yasuharu Sasaki
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Plasma Processing Apparatus, Plasma Processing Method and Storage M...
- Publication number 20140138356
- Publication date May 22, 2014
- TOKYO ELECTRON LIMITED
- Ikuo Sawada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING APPARATUS AND COATING METHOD
- Publication number 20130011555
- Publication date Jan 10, 2013
- TOKYO ELECTRON LIMITED
- Ikuo SAWADA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COOLING UNIT, PROCESSING CHAMBER, PART IN THE PROCESSING CHAMBER, A...
- Publication number 20120204576
- Publication date Aug 16, 2012
- TOKYO ELECTRON LIMITED
- Kazuyoshi MATSUZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE ADJUSTMENT METHOD
- Publication number 20120043024
- Publication date Feb 23, 2012
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION APPARATUS AND TEMPERATURE ADJUSTMENT METHOD
- Publication number 20120016508
- Publication date Jan 19, 2012
- TOKYO ELECTRON LIMITED
- Kazuyoshi Matsuzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
- Publication number 20100006543
- Publication date Jan 14, 2010
- TOKYO ELECTRON LIMITED
- Ikuo Sawada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating Apparatus and Coating Method
- Publication number 20090162547
- Publication date Jun 25, 2009
- Ikuo Sawada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kazuyoshi Matsuzaki

Person

Patents Grantslast 30 patents

Learning device, inference device, and learned model

Method of manufacturing semiconductor device and method of forming...

Film forming apparatus and film forming method

Temperature control method

Temperature adjustment method using wet surface in a processing cha...

Substrate processing apparatus

Temperature control apparatus, processing apparatus, and temperatur...

Plasma processing apparatus, plasma processing method and storage m...

Conveyance device and substrate processing system

Semiconductor fabrication apparatus and temperature adjustment method

Plasma processing apparatus, plasma processing method and storage m...

Patents Applicationslast 30 patents

LEARNING DEVICE, INFERENCE DEVICE, AND LEARNED MODEL

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF FORMING...

SUBSTRATE PROCESSING APPARATUS

FILM FORMING APPARATUS AND FILM FORMING METHOD

GAS SUPPLY AND EXHAUST STRUCTURE

TEMPERATURE CONTROL METHOD

SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE ADJUSTMENT METHOD

CONVEYANCE DEVICE AND SUBSTRATE PROCESSING SYSTEM

TEMPERATURE CONTROL APPARATUS, PROCESSING APPARATUS, AND TEMPERATUR...

Plasma Processing Apparatus, Plasma Processing Method and Storage M...

COATING APPARATUS AND COATING METHOD

COOLING UNIT, PROCESSING CHAMBER, PART IN THE PROCESSING CHAMBER, A...

SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE ADJUSTMENT METHOD

SEMICONDUCTOR FABRICATION APPARATUS AND TEMPERATURE ADJUSTMENT METHOD

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...

Coating Apparatus and Coating Method