Kazuyoshi Mizumoto

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Tosu-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, substrate processing device and etchin...
- Patent number 11,306,249
- Issue date Apr 19, 2022
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of thermal processing and method of pattern fo...
- Patent number 6,573,031
- Issue date Jun 3, 2003
- Tokyo Electron Limited
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spindrier
- Patent number 5,435,075
- Issue date Jul 25, 1995
- Tokyo Electron Limited
- Hirofumi Shiraishi
- F26 - DRYING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING DEVICE AND ETCHING LIQUID
- Publication number 20220213382
- Publication date Jul 7, 2022
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE AND ETCHIN...
- Publication number 20210032537
- Publication date Feb 4, 2021
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Apparatus and method of thermal processing and method of pattern fo...
- Publication number 20020076659
- Publication date Jun 20, 2002
- TOKYO ELECTRON LIMITED
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS