Kazuyoshi Namba

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Hachioji, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 6,990,704
- Issue date Jan 31, 2006
- Tokyo Electron Limited
- Kazuyoshi Namba
- B08 - CLEANING
Information Patent Grant
Processing apparatus and processing method
- Patent number 6,367,490
- Issue date Apr 9, 2002
- Tokyo Electron Limited
- Kazuyoshi Namba
- B08 - CLEANING
Information Patent Grant
Processing apparatus
- Patent number 6,178,580
- Issue date Jan 30, 2001
- Tokyo Electron Limited
- Akira Ishihara
- H01 - BASIC ELECTRIC ELEMENTS