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Kazuyoshi Ozawa
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Utsunomiya-shi, JP
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last 30 patents
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Patent Grant
Exposure method, exposure apparatus, and device manufacturing method
Patent number
9,513,564
Issue date
Dec 6, 2016
Canon Kabushiki Kaisha
Kazuyoshi Ozawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical system, exposure apparatus, and method of manufa...
Patent number
7,746,561
Issue date
Jun 29, 2010
Canon Kabushiki Kaisha
Kazuyoshi Ozawa
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Publication number
20140204353
Publication date
Jul 24, 2014
Canon Kabushiki Kaisha
Kazuyoshi Ozawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD OF MANUFA...
Publication number
20090080068
Publication date
Mar 26, 2009
Canon Kabushiki Kaisha
Kazuyoshi Ozawa
G02 - OPTICS
Information
Patent Application
Drive control apparatus for zoom lens apparatus
Publication number
20060056059
Publication date
Mar 16, 2006
Canon Kabushiki Kaisha
Kazuyoshi Ozawa
G02 - OPTICS