Kazuyoshi Shinohara

Person

Koshi-shi, Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,027,394
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Hiroki Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,769,661
- Issue date Sep 26, 2023
- Tokyo Electron Limited
- Hirofumi Takeguchi
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,676,835
- Issue date Jun 13, 2023
- Tokyo Electron Limited
- Hiroki Sakurai
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,569,086
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Kazuki Kosai
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,551,935
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Takashi Nakazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate solution-treatment apparatus, treatment solution supplyin...
- Patent number 10,937,669
- Issue date Mar 2, 2021
- Tokyo Electron Limited
- Kosuke Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,832,902
- Issue date Nov 10, 2020
- Tokyo Electron Limited
- Yoshinori Ikeda
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,685,858
- Issue date Jun 16, 2020
- Tokyo Electron Limited
- Hiroyuki Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and co...
- Patent number 10,475,638
- Issue date Nov 12, 2019
- Tokyo Electron Limited
- Kazuyoshi Shinohara
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,192,758
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and com...
- Patent number 9,805,957
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,768,039
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Kazuhiro Aiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and nozzle cleaning method
- Patent number 9,764,345
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Yoshihiro Kai
- C03 - GLASS MINERAL OR SLAG WOOL

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240290639
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Hiroki SAKURAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230268207
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Hiroki SAKURAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230099012
- Publication date Mar 30, 2023
- Tokyo Electron Limited
- Hiroki SAKURAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230079190
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Kazuki KOSAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220399208
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210134590
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Kazuki KOSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200381245
- Publication date Dec 3, 2020
- TOKYO ELECTRON LIMITED
- Hirofumi Takeguchi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200321217
- Publication date Oct 8, 2020
- TOKYO ELECTRON LIMITED
- Takashi Nakazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190006206
- Publication date Jan 3, 2019
- TOKYO ELECTRON LIMITED
- Hiroyuki Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SOLUTION-TREATMENT APPARATUS, TREATMENT SOLUTION SUPPLYIN...
- Publication number 20180350636
- Publication date Dec 6, 2018
- TOKYO ELECTRON LIMITED
- Kosuke FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180012781
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170186601
- Publication date Jun 29, 2017
- TOKYO ELECTRON LIMITED
- Yoshinori Ikeda
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...
- Publication number 20170047219
- Publication date Feb 16, 2017
- TOKYO ELECTRON LIMITED
- Kazuyoshi Shinohara
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...
- Publication number 20140360536
- Publication date Dec 11, 2014
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NOZZLE CLEANING METHOD
- Publication number 20140352730
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Yoshihiro Kai
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140137902
- Publication date May 22, 2014
- TOKYO ELECTRON LIMITED
- Kazuhiro Aiura
- H01 - BASIC ELECTRIC ELEMENTS

Kazuyoshi Shinohara

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate solution-treatment apparatus, treatment solution supplyin...

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing apparatus, substrate processing method, and co...

Substrate processing apparatus

Substrate processing apparatus, substrate processing method and com...

Substrate processing apparatus

Substrate processing apparatus and nozzle cleaning method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE SOLUTION-TREATMENT APPARATUS, TREATMENT SOLUTION SUPPLYIN...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...

SUBSTRATE PROCESSING APPARATUS AND NOZZLE CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS