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Kazuyoshi Sugawara
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Iwate, JP
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last 30 patents
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Patent Grant
Magnetic annealing apparatus and magnetic annealing method
Patent number
9,851,149
Issue date
Dec 26, 2017
Tokyo Electron Limited
Mitsuru Yamazaki
F27 - FURNACES KILNS OVENS RETORTS
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last 30 patents
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Patent Application
MAGNETIC ANNEALING APPARATUS AND MAGNETIC ANNEALING METHOD
Publication number
20160061525
Publication date
Mar 3, 2016
TOKYO ELECTRON LIMITED
Mitsuru Yamazaki
H01 - BASIC ELECTRIC ELEMENTS