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Kazuyoshi Takahashi
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Niigata-ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate bonded MEMS sensor
Patent number
8,207,586
Issue date
Jun 26, 2012
Alps Electric Co., Ltd.
Kiyoshi Sato
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
SUBSTRATE BONDED MEMS SENSOR
Publication number
20100072563
Publication date
Mar 25, 2010
Kiyoshi Sato
B81 - MICRO-STRUCTURAL TECHNOLOGY