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Kazuyoshi Tamura

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Patents Grantslast 30 patents

  • Information Patent Grant

    Three-dimensional ceramic heater
    • Patent number 10,080,259
    • Issue date Sep 18, 2018
    • Shin-Etsu Chemical Co., Ltd.
    • Takuma Kushihashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Silicon focus ring and method for producing the same
    • Patent number 6,815,352
    • Issue date Nov 9, 2004
    • Shin-Etsu Chemical Co., Ltd.
    • Kazuyoshi Tamura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Silicon electrode plate
    • Patent number 6,376,977
    • Issue date Apr 23, 2002
    • Shin-Etsu Chemical Co., Ltd.
    • Makoto Kawai
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    THREE-DIMENSIONAL CERAMIC HEATER
    • Publication number 20150053667
    • Publication date Feb 26, 2015
    • Shin-Etsu Chemical Co., Ltd.
    • Takuma Kushihashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...