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Kazuyoshi Watanabe
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Niiza-Shi, JP
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last 30 patents
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Patent Grant
Plasma processing unit and high-frequency electric power supplying...
Patent number
8,628,640
Issue date
Jan 14, 2014
Tokyo Electron Limited
Toshihiro Hayami
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Matching unit and plasma processing system
Patent number
7,112,926
Issue date
Sep 26, 2006
Tokyo Electron Limited
Shinji Himori
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Plasma processing unit and high-frequency electric power supplying...
Publication number
20040154540
Publication date
Aug 12, 2004
Toshihiro Hayami
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Matching unit and plasma processing system
Publication number
20020134508
Publication date
Sep 26, 2002
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS