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Kazuyuki HIRAO
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for image adjustment and charged particle beam system
Patent number
11,276,552
Issue date
Mar 15, 2022
HITACHI HIGH-TECH CORPORATION
Yuki Tomizawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam device
Patent number
11,276,550
Issue date
Mar 15, 2022
HITACHI HIGH-TECH CORPORATION
Mari Takabatake
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image-forming device, and dimension measurement device
Patent number
10,976,536
Issue date
Apr 13, 2021
HITACHI HIGH-TECH CORPORATION
Yasunori Takasugi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Image-forming device, and dimension measurement device
Patent number
10,620,421
Issue date
Apr 14, 2020
Hitachi High-Technologies Corporation
Yasunori Takasugi
G01 - MEASURING TESTING
Information
Patent Grant
Overlay error measuring device and computer program for causing com...
Patent number
10,545,017
Issue date
Jan 28, 2020
Hitachi High-Technologies Corporation
Satoru Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern measurement apparatus and defect inspection apparatus
Patent number
10,417,756
Issue date
Sep 17, 2019
Hitachi High-Technologies Corporation
Kei Sakai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Image-forming device, and dimension measurement device
Patent number
10,197,783
Issue date
Feb 5, 2019
Hitachi High-Technologies Corporation
Yasunori Takasugi
G02 - OPTICS
Information
Patent Grant
Charged particle beam device
Patent number
9,666,410
Issue date
May 30, 2017
Hitachi High-Technologies Corporation
Takefumi Kakinuma
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Charged Particle Beam Device
Publication number
20210241993
Publication date
Aug 5, 2021
HITACHI HIGH-TECH CORPORATION
Mari TAKABATAKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Image Adjustment and Charged Particle Beam System
Publication number
20210183611
Publication date
Jun 17, 2021
HITACHI HIGH-TECH CORPORATION
Yuki TOMIZAWA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Image-Forming Device, and Dimension Measurement Device
Publication number
20200201019
Publication date
Jun 25, 2020
Hitachi High-Technologies Corporation
Yasunori TAKASUGI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Image-Forming Device, and Dimension Measurement Device
Publication number
20190121113
Publication date
Apr 25, 2019
Hitachi High-Technologies Corporation
Yasunori TAKASUGI
G01 - MEASURING TESTING
Information
Patent Application
Pattern Measurement Apparatus and Flaw Inspection Apparatus
Publication number
20180012349
Publication date
Jan 11, 2018
Hitachi High-Technologies Corporation
Kei SAKAI
G01 - MEASURING TESTING
Information
Patent Application
Charged Particle Beam Device
Publication number
20160172154
Publication date
Jun 16, 2016
Hitachi High-Technologies Corporation
Takefumi KAKINUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OVERLAY ERROR MEASURING DEVICE AND COMPUTER PROGRAM FOR CAUSING COM...
Publication number
20150285627
Publication date
Oct 8, 2015
Hitachi High-Technologies Corporation
Satoru Yamaguchi
G01 - MEASURING TESTING
Information
Patent Application
Image-Forming Device, and Dimension Measurement Device
Publication number
20150002652
Publication date
Jan 1, 2015
Hitachi High-Technologies Corporation
Yasunori Takasugi
G02 - OPTICS