Kazuyuki Kakuta

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Patents Grantslast 30 patents

Information Patent Grant
Phase shift mask, method of forming asymmetric pattern, method of m...
- Patent number 9,390,934
- Issue date Jul 12, 2016
- Hitachi High-Technologies Corporation
- Kazuyuki Kakuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PHASE SHIFT MASK, METHOD OF FORMING ASYMMETRIC PATTERN, METHOD OF M...
- Publication number 20140302679
- Publication date Oct 9, 2014
- Hitachi High-Technologies Corporation
- Kazuyuki Kakuta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFRACTION GRATING MANUFACTURING METHOD, SPECTROPHOTOMETER, AND SE...
- Publication number 20140092384
- Publication date Apr 3, 2014
- Hitachi High-Technologies Corporation
- Yoshisada Ebata
- G02 - OPTICS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20130244146
- Publication date Sep 19, 2013
- Hitachi, Ltd
- Kazuyuki Kakuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY