Kazuyuki KASUMI

Person

Utsunomiya, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method in which alignment control of a member and a substrate is ef...
- Patent number 10,990,005
- Issue date Apr 27, 2021
- Canon Kabushiki Kaisha
- Shingo Okushima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprinting apparatus for producing a member in which a mold contact...
- Patent number 10,670,961
- Issue date Jun 2, 2020
- Canon Kabushiki Kaisha
- Shingo Okushima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus in which alignment control of a mold and a substr...
- Patent number 9,579,843
- Issue date Feb 28, 2017
- Canon Kabushiki Kaisha
- Shingo Okushima
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprinting method and process for producing a member in which a mol...
- Patent number 9,573,319
- Issue date Feb 21, 2017
- Canon Kabushiki Kaisha
- Shingo Okushima
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 8,973,495
- Issue date Mar 10, 2015
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprinting apparatus and article manufacturing method
- Patent number 8,951,031
- Issue date Feb 10, 2015
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprinting machine and device manufacturing method
- Patent number 8,834,144
- Issue date Sep 16, 2014
- Canon Kabushiki Kaisha
- Takashi Nakamura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern transferring apparatus and pattern transferring method
- Patent number 8,616,874
- Issue date Dec 31, 2013
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Holding apparatus, optical apparatus, and telescope
- Patent number 8,564,891
- Issue date Oct 22, 2013
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- G02 - OPTICS
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 8,414,279
- Issue date Apr 9, 2013
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing apparatus
- Patent number 8,393,885
- Issue date Mar 12, 2013
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Load-lock technique
- Patent number 8,347,915
- Issue date Jan 8, 2013
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Processing apparatus and method
- Patent number 7,846,346
- Issue date Dec 7, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprinting machine and device manufacturing method
- Patent number 7,815,424
- Issue date Oct 19, 2010
- Canon Kabushiki Kaisha
- Takashi Nakamura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing apparatus
- Patent number 7,815,425
- Issue date Oct 19, 2010
- Canon Kabushiki Kaisha
- Toshinobu Tokita
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing method
- Patent number 7,807,065
- Issue date Oct 5, 2010
- Canon Kabushiki Kaisha
- Toshinobu Tokita
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing apparatus and method
- Patent number 7,789,647
- Issue date Sep 7, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing apparatus and device manufacturing method
- Patent number 7,785,091
- Issue date Aug 31, 2010
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Pattern transferring mold, pattern transferring apparatus and devic...
- Patent number 7,690,912
- Issue date Apr 6, 2010
- Canon Kabushiki Kaisha
- Toshinobu Tokita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pattern forming apparatus
- Patent number 7,658,601
- Issue date Feb 9, 2010
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load-lock technique
- Patent number 7,411,655
- Issue date Aug 12, 2008
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus
- Patent number 7,381,272
- Issue date Jun 3, 2008
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Exposure apparatus, device manufacturing method, stage apparatus, a...
- Patent number 7,248,335
- Issue date Jul 24, 2007
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,236,231
- Issue date Jun 26, 2007
- Canon Kabushiki Kaisha
- Takashi Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, device manufacturing method, pattern generator...
- Patent number 7,233,383
- Issue date Jun 19, 2007
- Canon Kabushiki Kaisha
- Toshinobu Tokita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Load-lock technique
- Patent number 7,218,382
- Issue date May 15, 2007
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fine pattern forming apparatus and fine pattern inspecting apparatus
- Patent number 7,196,321
- Issue date Mar 27, 2007
- Canon Kabushiki Kaisha
- Eigo Kawakami
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,180,575
- Issue date Feb 20, 2007
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation generating apparatus, radiation generating method, exposu...
- Patent number 7,110,504
- Issue date Sep 19, 2006
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Exposure apparatus, device manufacturing method, stage apparatus, a...
- Patent number 7,027,127
- Issue date Apr 11, 2006
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD IN WHICH ALIGNMENT CONTROL OF A MEMBER AND A SUBSTRATE IS EF...
- Publication number 20200241411
- Publication date Jul 30, 2020
- Canon Kabushiki Kaisha
- Shingo Okushima
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINTING APPARATUS FOR PRODUCING A MEMBER IN WHICH A MOLD CONTACT...
- Publication number 20170115560
- Publication date Apr 27, 2017
- Canon Kabushiki Kaisha
- Shingo Okushima
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
IMPRINTING APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20150123301
- Publication date May 7, 2015
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PATTERN TRANSFERRING APPARATUS AND PATTERN TRANSFERRING METHOD
- Publication number 20140151936
- Publication date Jun 5, 2014
- Canon Kabushiki Kaisha
- Kazuyuki KASUMI
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS IN WHICH ALIGNMENT CONTROL OF A MOLD AND A SUBSTR...
- Publication number 20130196016
- Publication date Aug 1, 2013
- Shingo Okushima
- B82 - NANO-TECHNOLOGY
Information Patent Application
HOLDING APPARATUS, OPTICAL APPARATUS, AND TELESCOPE
- Publication number 20110261448
- Publication date Oct 27, 2011
- Canon Kabushiki Kaisha
- Kazuyuki KASUMI
- G02 - OPTICS
Information Patent Application
PROCESSING APPARATUS AND METHOD
- Publication number 20100289190
- Publication date Nov 18, 2010
- Eigo Kawakami
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT METHOD AND IMPRINT APPARATUS
- Publication number 20100270705
- Publication date Oct 28, 2010
- Canon Kabushiki Kaisha
- Shingo Okushima
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINTING MACHINE AND DEVICE MANUFACTURING METHOD
- Publication number 20100148397
- Publication date Jun 17, 2010
- Canon Kabushiki Kaisha
- Takashi NAKAMURA
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20100072649
- Publication date Mar 25, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS
- Publication number 20100059904
- Publication date Mar 11, 2010
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINTING APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20100052217
- Publication date Mar 4, 2010
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20100031833
- Publication date Feb 11, 2010
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROCESSING APPARATUS
- Publication number 20080254626
- Publication date Oct 16, 2008
- Canon Kabushiki Kaisha
- Kazuyuki KASUMI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080093339
- Publication date Apr 24, 2008
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
LOAD-LOCK TECHNIQUE
- Publication number 20080003081
- Publication date Jan 3, 2008
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD-LOCK TECHNIQUE
- Publication number 20070178748
- Publication date Aug 2, 2007
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD
- Publication number 20070132157
- Publication date Jun 14, 2007
- Toshinobu Tokita
- B82 - NANO-TECHNOLOGY
Information Patent Application
Pattern transferring mold, pattern transferring apparatus and devic...
- Publication number 20060192320
- Publication date Aug 31, 2006
- Toshinobu Tokita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Pattern transferring apparatus and pattern transferring method
- Publication number 20060192928
- Publication date Aug 31, 2006
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Imprinting machine and device manufacturing method
- Publication number 20060157444
- Publication date Jul 20, 2006
- Takashi Nakamura
- B82 - NANO-TECHNOLOGY
Information Patent Application
Exposure apparatus, device manufacturing method, stage apparatus, a...
- Publication number 20060158630
- Publication date Jul 20, 2006
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing apparatus and method
- Publication number 20050275125
- Publication date Dec 15, 2005
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Application
Fine pattern forming apparatus and fine pattern inspecting apparatus
- Publication number 20050269035
- Publication date Dec 8, 2005
- Eigo Kawakami
- G01 - MEASURING TESTING
Information Patent Application
Exposure apparatus, and method, device manufacturing method, patter...
- Publication number 20050248659
- Publication date Nov 10, 2005
- Kazuyuki Kasumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, device manufacturing method, pattern generator...
- Publication number 20050237375
- Publication date Oct 27, 2005
- Toshinobu Tokita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing apparatus
- Publication number 20050230346
- Publication date Oct 20, 2005
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20050219485
- Publication date Oct 6, 2005
- Takashi Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing apparatus
- Publication number 20050212156
- Publication date Sep 29, 2005
- Toshinobu Tokita
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Radiation generating apparatus, radiation generating method, exposu...
- Publication number 20050207527
- Publication date Sep 22, 2005
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Kazuyuki KASUMI

Person

Patents Grantslast 30 patents

Method in which alignment control of a member and a substrate is ef...

Imprinting apparatus for producing a member in which a mold contact...

Imprint apparatus in which alignment control of a mold and a substr...

Imprinting method and process for producing a member in which a mol...

Imprint apparatus, imprint method, and article manufacturing method

Imprinting apparatus and article manufacturing method

Imprinting machine and device manufacturing method

Pattern transferring apparatus and pattern transferring method

Holding apparatus, optical apparatus, and telescope

Imprint apparatus and article manufacturing method

Processing apparatus

Load-lock technique

Processing apparatus and method

Imprinting machine and device manufacturing method

Processing apparatus

Processing method

Processing apparatus and method

Processing apparatus and device manufacturing method

Pattern transferring mold, pattern transferring apparatus and devic...

Pattern forming apparatus

Load-lock technique

Processing apparatus

Exposure apparatus, device manufacturing method, stage apparatus, a...

Exposure apparatus and device manufacturing method

Exposure apparatus, device manufacturing method, pattern generator...

Load-lock technique

Fine pattern forming apparatus and fine pattern inspecting apparatus

Exposure apparatus and device manufacturing method

Radiation generating apparatus, radiation generating method, exposu...

Exposure apparatus, device manufacturing method, stage apparatus, a...

Patents Applicationslast 30 patents

METHOD IN WHICH ALIGNMENT CONTROL OF A MEMBER AND A SUBSTRATE IS EF...

IMPRINTING APPARATUS FOR PRODUCING A MEMBER IN WHICH A MOLD CONTACT...

IMPRINTING APPARATUS AND ARTICLE MANUFACTURING METHOD

PATTERN TRANSFERRING APPARATUS AND PATTERN TRANSFERRING METHOD

IMPRINT APPARATUS IN WHICH ALIGNMENT CONTROL OF A MOLD AND A SUBSTR...

HOLDING APPARATUS, OPTICAL APPARATUS, AND TELESCOPE

PROCESSING APPARATUS AND METHOD

IMPRINT METHOD AND IMPRINT APPARATUS

IMPRINTING MACHINE AND DEVICE MANUFACTURING METHOD

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS

IMPRINTING APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

PROCESSING APPARATUS

PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD

LOAD-LOCK TECHNIQUE

LOAD-LOCK TECHNIQUE

PROCESSING METHOD

Pattern transferring mold, pattern transferring apparatus and devic...

Pattern transferring apparatus and pattern transferring method

Imprinting machine and device manufacturing method

Exposure apparatus, device manufacturing method, stage apparatus, a...

Processing apparatus and method

Fine pattern forming apparatus and fine pattern inspecting apparatus

Exposure apparatus, and method, device manufacturing method, patter...

Exposure apparatus, device manufacturing method, pattern generator...

Processing apparatus

Exposure apparatus and device manufacturing method

Processing apparatus

Radiation generating apparatus, radiation generating method, exposu...