Membership
Tour
Register
Log in
Kazuyuki KIKUCHI
Follow
Person
Iwate, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Heat treatment apparatus and film deposition method
Patent number
11,581,201
Issue date
Feb 14, 2023
Tokyo Electron Limited
Kazuteru Obara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing apparatus
Patent number
11,302,542
Issue date
Apr 12, 2022
Tokyo Electron Limited
Masato Kadobe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, gas supply method, substrate proces...
Patent number
10,287,682
Issue date
May 14, 2019
Tokyo Electron Limited
Kazuyuki Kikuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
HEAT TREATMENT APPARATUS AND FILM DEPOSITION METHOD
Publication number
20200303222
Publication date
Sep 24, 2020
TOKYO ELECTRON LIMITED
Kazuteru Obara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING APPARATUS
Publication number
20200227293
Publication date
Jul 16, 2020
TOKYO ELECTRON LIMITED
Masato KADOBE
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
Substrate Processing Apparatus, Gas Supply Method, Substrate Proces...
Publication number
20170275757
Publication date
Sep 28, 2017
TOKYO ELECTRON LIMITED
Kazuyuki KIKUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...