Kazuyuki Maetoko

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Phase shifter film and process for the same
- Patent number 7,282,308
- Issue date Oct 16, 2007
- Ulvac Coating Corporation
- Susumu Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase shifter film and process for the same
- Patent number 7,090,947
- Issue date Aug 15, 2006
- Ulvac Coating Corporation
- Susumu Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of patterning a mask blank
- Patent number 6,984,473
- Issue date Jan 10, 2006
- Mitsubishi Denki Kabushiki Kaisha
- Teruhiko Kumada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase-shift photo mask blank, phase-shift photo mask and method for...
- Patent number 6,569,577
- Issue date May 27, 2003
- Ulvac Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase-shifting photomask blank, phase-shifting photomask, and metho...
- Patent number 5,605,776
- Issue date Feb 25, 1997
- Ulvac Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Phase shifter film and process for the same
- Publication number 20070009810
- Publication date Jan 11, 2007
- ULVAC COATING CORPORATION
- Susumu Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Mask blank, protective film therefor and method of patterning mask...
- Publication number 20030152845
- Publication date Aug 14, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Teruhiko Kumada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing phase shift mask, phase shift mask and appa...
- Publication number 20030108803
- Publication date Jun 12, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Kazuyuki Maetoko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Phase shifter film and process for the same
- Publication number 20020009653
- Publication date Jan 24, 2002
- ULVAC COATING CORPORATION and MITSUBISHI DENKI KABUSHIKI KAISHA
- Susumu Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...