Kazuyuki Majima

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Patents Grantslast 30 patents

Information Patent Grant
Substrate supporting apparatus, substrate processing apparatus, sub...
- Patent number 8,340,811
- Issue date Dec 25, 2012
- Canon Anelva Corporation
- Majima Kazuyuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COOLING APPARATUS AND HEATING APPARATUS
- Publication number 20110315346
- Publication date Dec 29, 2011
- Canon ANELVA Corporation
- Hidekazu Nishimura
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
SUBSTRATE SUPPORTING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...
- Publication number 20100222919
- Publication date Sep 2, 2010
- Canon ANELVA Corporation
- Majima Kazuyuki
- H01 - BASIC ELECTRIC ELEMENTS