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Kazuyuki Miura
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Semiconductor manufacturing apparatus and semiconductor manufacturi...
Patent number
9,793,102
Issue date
Oct 17, 2017
TOSHIBA MEMORY CORPORATION
Kazuyuki Miura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor production system
Patent number
5,694,325
Issue date
Dec 2, 1997
Kabushiki Kaisha Toshiba
Etsuo Fukuda
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURI...
Publication number
20160062349
Publication date
Mar 3, 2016
Kabushiki Kaisha Toshiba
KAZUYUKI MIURA
G05 - CONTROLLING REGULATING