TREA

Kazuyuki TEZUKA

Follow

Person

  • Nirasaki-shi, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Maintenance device
    • Patent number 11,532,467
    • Issue date Dec 20, 2022
    • Tokyo Electron Limited
    • Takehiro Ueda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processing method
    • Patent number 10,665,431
    • Issue date May 26, 2020
    • Tokyo Electron Limited
    • Kazuyuki Tezuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Fluid control apparatus
    • Patent number 9,169,558
    • Issue date Oct 27, 2015
    • Tokyo Electron Limited
    • Jun Hirose
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 8,394,230
    • Issue date Mar 12, 2013
    • Tokyo Electron Limited
    • Kazuyuki Tezuka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum apparatus
    • Patent number 7,472,581
    • Issue date Jan 6, 2009
    • Tokyo Electron Limited
    • Takashi Kitazawa
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Substrate processing apparatus and substrate transferring method
    • Patent number 7,299,104
    • Issue date Nov 20, 2007
    • Tokyo Electron Limited
    • Kazuyuki Tezuka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Exhaust ring for manufacturing semiconductors
    • Patent number D494552
    • Issue date Aug 17, 2004
    • Tokyo Electron Limited
    • Kazuyuki Tezuka
    • D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

  • Information Patent Application

    MAINTENANCE DEVICE
    • Publication number 20200402764
    • Publication date Dec 24, 2020
    • TOKYO ELECTRON LIMITED
    • Takehiro UEDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PROCESSING METHOD
    • Publication number 20180294145
    • Publication date Oct 11, 2018
    • TOKYO ELECTRON LIMITED
    • Kazuyuki Tezuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20130189847
    • Publication date Jul 25, 2013
    • TOKYO ELECTRON LIMITED
    • Kazuyuki Tezuka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PROCESSING APPARATUS
    • Publication number 20120132367
    • Publication date May 31, 2012
    • TOKYO ELECTRON LIMITED
    • Kazuyuki Tezuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FLUID CONTROL APPARATUS
    • Publication number 20120031500
    • Publication date Feb 9, 2012
    • Jun Hirose
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MAGNETIC FIELD GENERATOR FOR MAGNETRON PLASMA
    • Publication number 20110232846
    • Publication date Sep 29, 2011
    • Shin-Etsu Chemical Co., Ltd.
    • Koji MIYATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20100218895
    • Publication date Sep 2, 2010
    • TOKYO ELECTRON LIMITED
    • Kazuyuki Tezuka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Semiconductor treating device
    • Publication number 20070160447
    • Publication date Jul 12, 2007
    • TOKYO ELECTRON LIMITED
    • Norihiko Amikura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vacuum apparatus, method for measuring a leak rate thereof, program...
    • Publication number 20060207314
    • Publication date Sep 21, 2006
    • TOKYO ELECTRON LIMITED
    • Takashi Kitazawa
    • G01 - MEASURING TESTING
  • Information Patent Application

    Magnetron plasma-use magnetic field generation device
    • Publication number 20050211383
    • Publication date Sep 29, 2005
    • Koji Miyata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate processing apparatus and substrate transferring method
    • Publication number 20040240971
    • Publication date Dec 2, 2004
    • TOKYO ELECTRON LIMITED
    • Kazuyuki Tezuka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Exhaust ring mechanism and plasma processing apparatus using the same
    • Publication number 20040129218
    • Publication date Jul 8, 2004
    • Toshiki Takahashi
    • H01 - BASIC ELECTRIC ELEMENTS