Kazuyuki Tomita

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Osaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Dry etching process utilizing a recessed electrode
- Patent number 5,443,689
- Issue date Aug 22, 1995
- Matsushita Electric Industrial Co., Ltd.
- Tadashi Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry-etching apparatus
- Patent number 4,906,347
- Issue date Mar 6, 1990
- Matsushita Electric Industrial Co., Ltd.
- Kazuyuki Tomita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry-etching method
- Patent number 4,678,539
- Issue date Jul 7, 1987
- Matsushita Electric Industrial Co., Ltd.
- Kazuyuki Tomita
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES