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Kazuyuki TOMIZAWA
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Yokohama, JP
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Patents Grants
last 30 patents
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Patent Grant
Wafer stage and method of manufacturing the same
Patent number
11,309,203
Issue date
Apr 19, 2022
Samsung Electronics Co., Ltd.
Kazuyuki Tomizawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer loading apparatus and film forming apparatus
Patent number
10,718,053
Issue date
Jul 21, 2020
Samsung Electronics Co., Ltd.
Kazuyuki Tomizawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
WAFER STAGE AND METHOD OF MANUFACTURING THE SAME
Publication number
20200152499
Publication date
May 14, 2020
Samsung Electronics Co., Ltd.
KAZUYUKI TOMIZAWA
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
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Patent Application
FILM FORMING APPARATUS
Publication number
20190177841
Publication date
Jun 13, 2019
Samsung Electronics Co., Ltd.
Kazuyuki TOMIZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER LOADING APPARATUS AND FILM FORMING APPARATUS
Publication number
20190177847
Publication date
Jun 13, 2019
Samsung Electronics Co., Ltd.
Kazuyuki TOMIZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...