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SUBSTRATE PROCESSING APPARATUS
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Publication number 20190393057
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Publication date Dec 26, 2019
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Kokusai Electric Corporation
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Satoshi SHIMAMOTO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate Processing Apparatus
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Publication number 20190221468
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Publication date Jul 18, 2019
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Kokusai Electric Corporation
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Naofumi OHASHI
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H01 - BASIC ELECTRIC ELEMENTS
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20190218664
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Publication date Jul 18, 2019
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Kokusai Electric Corporation
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Tetsuo YAMAMOTO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD OF PROCESSING SUBSTRATE
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Publication number 20180286727
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Publication date Oct 4, 2018
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Hitachi Kokusai Electric Inc.
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Naofumi OHASHI
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F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20180277405
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Publication date Sep 27, 2018
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Hitachi Kokusai Electric Inc.
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Satoshi SHIMAMOTO
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H01 - BASIC ELECTRIC ELEMENTS
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Publication number 20180233348
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Publication date Aug 16, 2018
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Hitachi Kokusai Electric Inc.
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Satoshi SHIMAMOTO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20180226228
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Publication date Aug 9, 2018
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Hitachi Kokusai Electric Inc.
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Kazuyuki TOYODA
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate Processing Apparatus
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Publication number 20170283949
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Publication date Oct 5, 2017
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Hitachi Kokusai Electric Inc.
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Takashi YAHATA
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate Processing Apparatus
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Publication number 20170283945
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Publication date Oct 5, 2017
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Hitachi Kokusai Electric Inc.
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Takashi YAHATA
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20170221738
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Publication date Aug 3, 2017
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Hitachi Kokusai Electric Inc.
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Akira TAKAHASHI
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H01 - BASIC ELECTRIC ELEMENTS
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20170159181
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Publication date Jun 8, 2017
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Hitachi Kokusai Electric Inc.
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Kazuyuki TOYODA
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20160276135
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Publication date Sep 22, 2016
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Hitachi Kokusai Electric Inc.
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Tetsuo YAMAMOTO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate Processing Apparatus
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Publication number 20160276183
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Publication date Sep 22, 2016
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Hitachi Kokusai Electric Inc.
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Naofumi OHASHI
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H01 - BASIC ELECTRIC ELEMENTS
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20160230280
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Publication date Aug 11, 2016
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Hitachi Kokusai Electric Inc.
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Shun MATSUI
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20160024650
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Publication date Jan 28, 2016
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HITACHI KOKUSAI ELECTRIC INC.
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Kazuyuki TOYODA
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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