Kazuyuki Tsuruoka

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Zama-City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer table for local dry etching apparatus
- Patent number 7,005,032
- Issue date Feb 28, 2006
- Speedfam Co., Ltd
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Local dry etching method
- Patent number 6,908,566
- Issue date Jun 21, 2005
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Multi-step local dry etching method for SOI wafer
- Publication number 20040063329
- Publication date Apr 1, 2004
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Local dry etching method
- Publication number 20030199168
- Publication date Oct 23, 2003
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer table for local dry etching apparatus
- Publication number 20020139482
- Publication date Oct 3, 2002
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS