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Hillsboro, OR, US
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last 30 patents
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Patent Grant
Via characterization for BCD and depth metrology
Patent number
10,254,110
Issue date
Apr 9, 2019
Nanometrics Incorporated
Ke Xiao
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
VIA CHARACTERIZATION FOR BCD AND DEPTH METROLOGY
Publication number
20150168128
Publication date
Jun 18, 2015
Nanometrics Incorporated
Ke XIAO
G01 - MEASURING TESTING