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Singapore, SG
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last 30 patents
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Patent Application
METHODS AND APPARATUS FOR RPS-RF PLASMA CLEAN AND ACTIVATION FOR AD...
Publication number
20240412948
Publication date
Dec 12, 2024
Applied Materials, Inc.
Shuran SHENG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD AND APPARATUS FOR SUBSTRATE CLEANING IN STACK-DIE HYBRID BON...
Publication number
20240390950
Publication date
Nov 28, 2024
Applied Materials, Inc.
Ke ZHENG
B08 - CLEANING