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Kedi Wu
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Fremont, CA, US
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last 30 patents
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Patent Grant
Fluorine-free tungsten ALD for dielectric selectivity improvement
Patent number
12,062,545
Issue date
Aug 13, 2024
Applied Materials, Inc.
Ilanit Fisher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Method Of Reducing Titanium Nitride Etching During Tungsten Film Fo...
Publication number
20220098731
Publication date
Mar 31, 2022
Applied Materials, Inc.
Kedi Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FLUORINE-FREE TUNGSTEN ALD FOR DIELECTRIC SELECTIVITY IMPROVEMENT
Publication number
20210384036
Publication date
Dec 9, 2021
Applied Materials, Inc.
Ilanit Fisher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fluorine-Free Tungsten ALD And Tungsten Selective CVD For Dielectrics
Publication number
20210384035
Publication date
Dec 9, 2021
Applied Materials, Inc.
Ilanit Fisher
H01 - BASIC ELECTRIC ELEMENTS