-
Soft MEMS
-
Patent number 8,431,080
-
Issue date Apr 30, 2013
-
The Board of Trustees of the University of Illinois
-
Chang Liu
-
B81 - MICRO-STRUCTURAL TECHNOLOGY
-
-
Microfabricated micro fluid channels
-
Patent number 7,737,045
-
Issue date Jun 15, 2010
-
The Board of Trustees of the University of Illinois
-
Chang Liu
-
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
-
Microfluidic systems and components
-
Patent number 7,351,303
-
Issue date Apr 1, 2008
-
The Board of Trustees of the University of Illinois
-
Chang Liu
-
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
-
Microfabricated micro fluid channels
-
Patent number 7,217,396
-
Issue date May 15, 2007
-
The Board of Trustees of the University of Illinois
-
Chang Liu
-
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC