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Kee W. Rhee
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Silver Springs, MD, US
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last 30 patents
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Patent Grant
Lithographic mask and method for fabrication thereof
Patent number
6,017,658
Issue date
Jan 25, 2000
The United States of America as represented by the Secretary of the Navy
Kee W. Rhee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method and system for electron beam lithography
Patent number
5,336,892
Issue date
Aug 9, 1994
The United States of America as represented by the Secretary of the Navy
Elizabeth A. Dobisz
B82 - NANO-TECHNOLOGY