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Keebum Jung
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Gilroy, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Nitrogen-free dielectric anti-reflective coating and hardmask
Patent number
6,927,178
Issue date
Aug 9, 2005
Applied Materials, Inc.
Bok Hoen Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Stress-tuned, single-layer silicon nitride film
Publication number
20050170104
Publication date
Aug 4, 2005
APPLIED MATERIALS, INC.
KeeBum Jung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Nitrogen-free dielectric anti-reflective coating and hardmask
Publication number
20040214446
Publication date
Oct 28, 2004
APPLIED MATERIALS, INC.
Bok Hoen Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...