Kei Furuuchi

Person

  • Tokyo, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Electrostatic chuck apparatus

    • Patent number 9,837,296
    • Issue date Dec 5, 2017
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi Maeta
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device

    • Patent number 9,412,635
    • Issue date Aug 9, 2016
    • Tokyo Electron Limited
    • Yasuharu Sasaki
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Electrostatic chuck apparatus

    • Patent number 9,343,346
    • Issue date May 17, 2016
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Electrostatic chuck device

    • Patent number 9,330,953
    • Issue date May 3, 2016
    • Sumitomo Osaka Cement Co., Ltd.
    • Yukio Miura
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE

    • Publication number 20140376148
    • Publication date Dec 25, 2014
    • Yasuharu Sasaki
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE

    • Publication number 20140008880
    • Publication date Jan 9, 2014
    • Sumitomo Osaka Cement Co., Ltd.
    • Yukio Miura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK APPARATUS

    • Publication number 20130265690
    • Publication date Oct 10, 2013
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi Maeta
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK APPARATUS

    • Publication number 20120299253
    • Publication date Nov 29, 2012
    • SUMITOMO OSAKA CEMENT CO., LTD.
    • Mamoru Kosakai
    • H01 - BASIC ELECTRIC ELEMENTS