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Kei Furuuchi
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chuck apparatus
Patent number
9,837,296
Issue date
Dec 5, 2017
Sumitomo Osaka Cement Co., Ltd.
Shinichi Maeta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck device
Patent number
9,412,635
Issue date
Aug 9, 2016
Tokyo Electron Limited
Yasuharu Sasaki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrostatic chuck apparatus
Patent number
9,343,346
Issue date
May 17, 2016
Sumitomo Osaka Cement Co., Ltd.
Mamoru Kosakai
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Electrostatic chuck device
Patent number
9,330,953
Issue date
May 3, 2016
Sumitomo Osaka Cement Co., Ltd.
Yukio Miura
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
ELECTROSTATIC CHUCK DEVICE
Publication number
20140376148
Publication date
Dec 25, 2014
Yasuharu Sasaki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ELECTROSTATIC CHUCK DEVICE
Publication number
20140008880
Publication date
Jan 9, 2014
Sumitomo Osaka Cement Co., Ltd.
Yukio Miura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK APPARATUS
Publication number
20130265690
Publication date
Oct 10, 2013
Sumitomo Osaka Cement Co., Ltd.
Shinichi Maeta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK APPARATUS
Publication number
20120299253
Publication date
Nov 29, 2012
SUMITOMO OSAKA CEMENT CO., LTD.
Mamoru Kosakai
H01 - BASIC ELECTRIC ELEMENTS