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Kei Matsumoto
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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for measuring impurity metal concentration
Patent number
7,141,992
Issue date
Nov 28, 2006
Komatsu Electronic Metals Co., Ltd.
Ryuuji Ohno
G01 - MEASURING TESTING
Information
Patent Grant
Method for fabricating an SOI substrate
Patent number
5,866,468
Issue date
Feb 2, 1999
Komatsu Electronic Metal Co., Ltd.
Mitsuo Kono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of processing a surface of a semiconductor substrate
Patent number
5,849,603
Issue date
Dec 15, 1998
Komatsu Electronic Metals Co., Ltd.
Hirotaka Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon-on-insulator substrate and a method for fabricating the same
Patent number
5,770,511
Issue date
Jun 23, 1998
Komatsu Electronic Metals Co., Ltd.
Kei Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of evaluating a density of oxygen-precipitation defects in a...
Patent number
5,742,175
Issue date
Apr 21, 1998
Komatsu Electronic Metals, Inc.
Hirotaka Kato
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring a Fe-B concentration of a silicon wafer
Patent number
5,742,176
Issue date
Apr 21, 1998
Komatsu Electronic Metals Co., Ltd.
Hirotaka Kato
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Method for measuring impurity metal concentration
Publication number
20060066324
Publication date
Mar 30, 2006
KOMATSU ELECTRONIC METALS CO., LTD.
Ryuuji Ohno
G01 - MEASURING TESTING