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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Designing method and device for phase shift mask
Patent number
7,367,010
Issue date
Apr 29, 2008
Dai Nippon Printing Co., Ltd.
Kei Mesuda
E21 - EARTH DRILLING MINING
Information
Patent Grant
Designing method and device for phase shift mask
Patent number
7,287,240
Issue date
Oct 23, 2007
Dai Nippon Printing Co., Ltd.
Nobuhito Toyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Designing method and device for phase shift mask
Patent number
7,067,221
Issue date
Jun 27, 2006
Dai Nippon Printing Co., Ltd.
Kei Mesuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Designing method and device for phase shift mask
Publication number
20060141365
Publication date
Jun 29, 2006
Nobuhito Toyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Designing method and device for phase shift mask
Publication number
20050262468
Publication date
Nov 24, 2005
DAI NIPPON PRINTING CO. , LTD.
Kei Mesuda
E21 - EARTH DRILLING MINING
Information
Patent Application
Designing method and device for phase shift mask
Publication number
20040101766
Publication date
May 27, 2004
DAI NIPPON PRINTING CO. , LTD.
Kei Mesuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY