Kei Sakai

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron beam observation device, electron beam observation system,...
- Patent number 11,791,130
- Issue date Oct 17, 2023
- HITACHI HIGH-TECH CORPORATION
- Koichi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,670,481
- Issue date Jun 6, 2023
- HITACHI HIGH-TECH CORPORATION
- Motonobu Hommi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,626,266
- Issue date Apr 11, 2023
- HITACHI HIGH-TECH CORPORATION
- Keiichiro Hitomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern measurement device and non-transitory computer readable med...
- Patent number 11,177,112
- Issue date Nov 16, 2021
- HITACHI HIGH-TECH CORPORATION
- Satoru Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam observation device, electron beam observation system,...
- Patent number 11,170,969
- Issue date Nov 9, 2021
- HITACHI HIGH-TECH CORPORATION
- Koichi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device and image processing method
- Patent number 11,011,346
- Issue date May 18, 2021
- HITACHI HIGH-TECH CORPORATION
- Koichi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device for imaging vias inside trenches
- Patent number 10,984,980
- Issue date Apr 20, 2021
- HITACHI HIGH-TECH CORPORATION
- Kei Sakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image-forming device, and dimension measurement device
- Patent number 10,976,536
- Issue date Apr 13, 2021
- HITACHI HIGH-TECH CORPORATION
- Yasunori Takasugi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,665,420
- Issue date May 26, 2020
- Hitachi High-Technologies Corporation
- Yasunori Takasugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image-forming device, and dimension measurement device
- Patent number 10,620,421
- Issue date Apr 14, 2020
- Hitachi High-Technologies Corporation
- Yasunori Takasugi
- G01 - MEASURING TESTING
Information Patent Grant
Overlay error measuring device and computer program for causing com...
- Patent number 10,545,017
- Issue date Jan 28, 2020
- Hitachi High-Technologies Corporation
- Satoru Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern measurement apparatus and defect inspection apparatus
- Patent number 10,417,756
- Issue date Sep 17, 2019
- Hitachi High-Technologies Corporation
- Kei Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image-forming device, and dimension measurement device
- Patent number 10,197,783
- Issue date Feb 5, 2019
- Hitachi High-Technologies Corporation
- Yasunori Takasugi
- G02 - OPTICS
Information Patent Grant
Method for pattern measurement, method for setting device parameter...
- Patent number 9,831,062
- Issue date Nov 28, 2017
- Hitachi High-Technologies Corporation
- Makoto Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern measurement device, evaluation method of polymer compounds...
- Patent number 9,589,343
- Issue date Mar 7, 2017
- Hitachi High-Technologies Corporation
- Miki Isawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Specimen potential measuring method, and charged particle beam device
- Patent number 9,129,775
- Issue date Sep 8, 2015
- Hitachi High-Technologies Corporation
- Tatsuaki Ishijima
- G01 - MEASURING TESTING
Information Patent Grant
Pattern measuring apparatus
- Patent number 9,024,272
- Issue date May 5, 2015
- Hitachi High-Technologies Corporation
- Kei Sakai
- G01 - MEASURING TESTING
Information Patent Grant
Pattern-searching condition determining method, and pattern-searchi...
- Patent number 8,478,078
- Issue date Jul 2, 2013
- Hitachi High-Technologies Corporation
- Kei Sakai
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Correction Coefficient Calculation Device, Correction Coefficient C...
- Publication number 20230343547
- Publication date Oct 26, 2023
- Hitachi High-Tech Corporation
- Miki AOYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing System and Charged Particle Beam Apparatus
- Publication number 20230314128
- Publication date Oct 5, 2023
- HITACHI HIGH-TECH CORPORATION
- Masaya GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR CALCULATING ROUGHNES...
- Publication number 20230095456
- Publication date Mar 30, 2023
- HITACHI HIGH-TECH CORPORATION
- Daisuke BIZEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Overlay Measurement System and Overlay Measurement Device
- Publication number 20220319804
- Publication date Oct 6, 2022
- Hitachi High-Tech Corporation
- Masaki SUGIE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Measurement System, Method for Generating Learning Model to Be Used...
- Publication number 20220277434
- Publication date Sep 1, 2022
- Hitachi High-Tech Corporation
- Ryou YUMIBA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Measurement System, Pattern Measurement Method, and Program
- Publication number 20220230281
- Publication date Jul 21, 2022
- HITACHI HIGH-TECH CORPORATION
- Toshimasa Kameda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged Particle Beam Device
- Publication number 20220165537
- Publication date May 26, 2022
- HITACHI HIGH-TECH CORPORATION
- Motonobu HOMMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220130638
- Publication date Apr 28, 2022
- HITACHI HIGH-TECH CORPORATION
- Keiichiro HITOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Observation Device, Electron Beam Observation System,...
- Publication number 20220051868
- Publication date Feb 17, 2022
- Hitachi High-Tech Corporation
- Koichi HAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM OBSERVATION DEVICE, ELECTRON BEAM OBSERVATION SYSTEM,...
- Publication number 20210125806
- Publication date Apr 29, 2021
- Hitachi High-Technologies Corporation
- Koichi HAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Measurement Device and Non-Transitory Computer Readable Med...
- Publication number 20200411281
- Publication date Dec 31, 2020
- Hitachi High-Tech Corporation
- Satoru YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE AND IMAGE PROCESSING METHOD
- Publication number 20200303159
- Publication date Sep 24, 2020
- Hitachi High-Technologies Corporation
- Koichi HAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image-Forming Device, and Dimension Measurement Device
- Publication number 20200201019
- Publication date Jun 25, 2020
- Hitachi High-Technologies Corporation
- Yasunori TAKASUGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20190295815
- Publication date Sep 26, 2019
- Hitachi High-Technologies Corporation
- Yasunori TAKASUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image-Forming Device, and Dimension Measurement Device
- Publication number 20190121113
- Publication date Apr 25, 2019
- Hitachi High-Technologies Corporation
- Yasunori TAKASUGI
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Device
- Publication number 20190035600
- Publication date Jan 31, 2019
- Hitachi High-Technologies Corporation
- Kei SAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Measurement Apparatus and Flaw Inspection Apparatus
- Publication number 20180012349
- Publication date Jan 11, 2018
- Hitachi High-Technologies Corporation
- Kei SAKAI
- G01 - MEASURING TESTING
Information Patent Application
Method for Pattern Measurement, Method for Setting Device Parameter...
- Publication number 20150357158
- Publication date Dec 10, 2015
- Hitachi High-Technologies Corporation
- Makoto SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERLAY ERROR MEASURING DEVICE AND COMPUTER PROGRAM FOR CAUSING COM...
- Publication number 20150285627
- Publication date Oct 8, 2015
- Hitachi High-Technologies Corporation
- Satoru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
Pattern Measurement Device, Evaluation Method of Polymer Compounds...
- Publication number 20150243008
- Publication date Aug 27, 2015
- Hitachi High-Technologies Corporation
- Miki Isawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Image-Forming Device, and Dimension Measurement Device
- Publication number 20150002652
- Publication date Jan 1, 2015
- Hitachi High-Technologies Corporation
- Yasunori Takasugi
- G02 - OPTICS
Information Patent Application
Pattern Measuring Apparatus and Computer Program
- Publication number 20120267528
- Publication date Oct 25, 2012
- Hitachi High-Technologies Corporation
- Kei Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SPECIMEN POTENTIAL MEASURING METHOD, AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20120119085
- Publication date May 17, 2012
- Hitachi High-Technologies Corporation
- Tatsuaki Ishijima
- G01 - MEASURING TESTING
Information Patent Application
PATTERN-SEARCHING CONDITION DETERMINING METHOD, AND PATTERN-SEARCHI...
- Publication number 20110194778
- Publication date Aug 11, 2011
- Hitachi High-Technologies Corporation
- Kei Sakai
- G06 - COMPUTING CALCULATING COUNTING

Person

Patents Grantslast 30 patents

Electron beam observation device, electron beam observation system,...

Charged particle beam device

Charged particle beam device

Pattern measurement device and non-transitory computer readable med...

Electron beam observation device, electron beam observation system,...

Electron beam device and image processing method

Charged particle beam device for imaging vias inside trenches

Image-forming device, and dimension measurement device

Charged particle beam apparatus

Image-forming device, and dimension measurement device

Overlay error measuring device and computer program for causing com...

Pattern measurement apparatus and defect inspection apparatus

Image-forming device, and dimension measurement device

Method for pattern measurement, method for setting device parameter...

Pattern measurement device, evaluation method of polymer compounds...

Specimen potential measuring method, and charged particle beam device

Pattern measuring apparatus

Pattern-searching condition determining method, and pattern-searchi...

Patents Applicationslast 30 patents

Correction Coefficient Calculation Device, Correction Coefficient C...

Processing System and Charged Particle Beam Apparatus

CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR CALCULATING ROUGHNES...

Overlay Measurement System and Overlay Measurement Device

Measurement System, Method for Generating Learning Model to Be Used...

Pattern Measurement System, Pattern Measurement Method, and Program

Charged Particle Beam Device

CHARGED PARTICLE BEAM DEVICE

Electron Beam Observation Device, Electron Beam Observation System,...

ELECTRON BEAM OBSERVATION DEVICE, ELECTRON BEAM OBSERVATION SYSTEM,...

Pattern Measurement Device and Non-Transitory Computer Readable Med...

ELECTRON BEAM DEVICE AND IMAGE PROCESSING METHOD

Image-Forming Device, and Dimension Measurement Device

Charged Particle Beam Apparatus

Image-Forming Device, and Dimension Measurement Device

Charged Particle Beam Device

Pattern Measurement Apparatus and Flaw Inspection Apparatus

Method for Pattern Measurement, Method for Setting Device Parameter...

OVERLAY ERROR MEASURING DEVICE AND COMPUTER PROGRAM FOR CAUSING COM...

Pattern Measurement Device, Evaluation Method of Polymer Compounds...

Image-Forming Device, and Dimension Measurement Device

Pattern Measuring Apparatus and Computer Program

SPECIMEN POTENTIAL MEASURING METHOD, AND CHARGED PARTICLE BEAM DEVICE

PATTERN-SEARCHING CONDITION DETERMINING METHOD, AND PATTERN-SEARCHI...