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Kei Sano
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Sapporo City, JP
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last 30 patents
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Patent Grant
State determination device, state determination method, and compute...
Patent number
12,176,227
Issue date
Dec 24, 2024
Tokyo Electron Limited
Junnosuke Maki
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate state determining apparatus, substrate processing apparat...
Patent number
11,598,007
Issue date
Mar 7, 2023
Tokyo Electron Limited
Nao Akashi
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
POSITION DETECTION METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240320837
Publication date
Sep 26, 2024
TOKYO ELECTRON LIMITED
Hikaru SATO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
STATE DETERMINATION DEVICE, STATE DETERMINATION METHOD, AND COMPUTE...
Publication number
20220223443
Publication date
Jul 14, 2022
TOKYO ELECTRON LIMITED
Junnosuke MAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE STATE DETERMINING APPARATUS, SUBSTRATE PROCESSING APPARAT...
Publication number
20200080202
Publication date
Mar 12, 2020
TOKYO ELECTRON LIMITED
Nao Akashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...