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Kei SHIBAYAMA
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Tokyo, JP
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last 30 patents
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Patent Grant
Examination device
Patent number
11,946,858
Issue date
Apr 2, 2024
HITACHI HIGH-TECH CORPORATION
Yoshihiro Satou
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
WAFER INSPECTION APPARATUS
Publication number
20250004043
Publication date
Jan 2, 2025
Hitachi High-Tech Corporation
Yoshihiro SATOU
G01 - MEASURING TESTING
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Patent Application
EXAMINATION DEVICE
Publication number
20210404946
Publication date
Dec 30, 2021
HITACHI HIGH-TECH CORPORATION
Yoshihiro SATOU
G01 - MEASURING TESTING