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Kei TAKECHI
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Kyoto-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing method
Patent number
11,699,601
Issue date
Jul 11, 2023
SCREEN Holdings Co., Ltd.
Tomohiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing device and substrate processing method
Patent number
11,164,750
Issue date
Nov 2, 2021
SCREEN Holdings Co., Ltd.
Tomohiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment apparatus and substrate treatment method
Patent number
10,559,480
Issue date
Feb 11, 2020
SCREEN Holdings Co., Ltd.
Koji Kurasaki
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230121666
Publication date
Apr 20, 2023
SCREEN Holdings Co., Ltd.
Tomohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20210327729
Publication date
Oct 21, 2021
SCREEN Holdings Co., Ltd.
Tomohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
Publication number
20200098597
Publication date
Mar 26, 2020
SCREEN Holdings Co., Ltd.
Tomohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
Publication number
20200098598
Publication date
Mar 26, 2020
SCREEN Holdings Co., Ltd.
Tomohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
Publication number
20180277454
Publication date
Sep 27, 2018
SCREEN Holdings Co., Ltd.
Koji KURASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
Publication number
20180247839
Publication date
Aug 30, 2018
SCREEN Holdings Co., Ltd.
Koji KURASAKI
B08 - CLEANING