Kei-Wei CHEN

Person

Tainan City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Metal heterojunction structure with capping metal layer
- Patent number 12,224,179
- Issue date Feb 11, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Sheng Lin
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Manufacturing method of fin-type field effect transistor structure
- Patent number 12,211,843
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical planarization tool
- Patent number 12,172,263
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Michael Yen
- B24 - GRINDING POLISHING
Information Patent Grant
Thin film metrology
- Patent number 12,158,332
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih Hung Chen
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device and method
- Patent number 12,159,925
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ji-Yin Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and methods of forming same
- Patent number 12,132,107
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for wafer backside polishing
- Patent number 12,131,896
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kei-Wei Chen
- B08 - CLEANING
Information Patent Grant
Slurry composition, semiconductor structure and method for forming...
- Patent number 12,131,944
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Wei Hsu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Electrical cleaning tool for wafer polishing tool system
- Patent number 12,128,455
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Wen Liu
- B08 - CLEANING
Information Patent Grant
Self-healing polishing pad
- Patent number 12,087,590
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Hao Kung
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,068,169
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ji Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal loss prevention using implantation
- Patent number 12,068,195
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Chieh Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming gate line-end of semiconductor structures with improved met...
- Patent number 12,068,196
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Che-Liang Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fin-type field effect transistor
- Patent number 12,046,661
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mega-sonic vibration assisted chemical mechanical planarization
- Patent number 12,036,636
- Issue date Jul 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical planarization tool
- Patent number 12,030,159
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tung-Kai Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor structure and method of forming the same
- Patent number 12,021,117
- Issue date Jun 25, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Te-Ming Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacture
- Patent number 12,002,854
- Issue date Jun 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Heng-Wen Ting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for chemical mechanical polishing and forming interconnect...
- Patent number 12,002,684
- Issue date Jun 4, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ji Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a FinFET device
- Patent number 11,991,936
- Issue date May 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chang-Miao Liu
Information Patent Grant
CMP system and method of use
- Patent number 11,984,323
- Issue date May 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Te-Chien Hou
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing apparatus and method
- Patent number 11,964,358
- Issue date Apr 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shang-Yu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Zone-based CMP target control
- Patent number 11,951,587
- Issue date Apr 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Che-Liang Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FinFET structure and method for manufacturing thereof
- Patent number 11,929,398
- Issue date Mar 12, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control in chemical mechanical polish
- Patent number 11,904,430
- Issue date Feb 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kei-Wei Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Magnetic slurry for highly efficiency CMP
- Patent number 11,854,827
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Ting Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Semiconductor device structure with interconnect structure and meth...
- Patent number 11,854,872
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor method and device
- Patent number 11,854,901
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Hsiung Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods to clean chemical mechanical polishing systems
- Patent number 11,850,704
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Chieh Chang
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing apparatus including a multi-zone platen
- Patent number 11,772,228
- Issue date Oct 3, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ting-Hsun Chang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RETAINING RING FOR CHEMICAL-MECHANICAL POLISHING
- Publication number 20240420978
- Publication date Dec 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jeng-Chi LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR REMOVING IMPURITIES DURING CHEMICAL MECHANICA...
- Publication number 20240412977
- Publication date Dec 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Te-Chien HOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING TOOL AND METHOD
- Publication number 20240395537
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-hsiang Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL MECHANICAL POLISH SLURRY AND METHOD OF MANUFACTURE
- Publication number 20240395562
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD FOR WAFER BACKSIDE POLISHING
- Publication number 20240387162
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- KEI-WEI CHEN
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20240383093
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Chien HOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOTSPOT AVOIDANCE METHOD OF MANUFACTURING INTEGRATED CIRCUITS
- Publication number 20240378362
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- I-Shuo Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SLURRY COMPOSITION, SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING...
- Publication number 20240379421
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-WEI HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICES
- Publication number 20240371983
- Publication date Nov 7, 2024
- Ji-Yin Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICAL CLEANING TOOL FOR WAFER POLISHING TOOL SYSTEM
- Publication number 20240367202
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Wen Liu
- B24 - GRINDING POLISHING
Information Patent Application
SELF-HEALING POLISHING PAD
- Publication number 20240371648
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- B24 - GRINDING POLISHING
Information Patent Application
ION IMPLANT PROCESS FOR DEFECT ELIMINATION IN METAL LAYER PLANARIZA...
- Publication number 20240363404
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Cheng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240363361
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ji CUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIN-TYPE FIELD EFFECT TRANSISTOR
- Publication number 20240339521
- Publication date Oct 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE
- Publication number 20240313051
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- TE-MING KUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR CHEMICAL MECHANICAL POLISHING AND FORMING INTERCONNECT...
- Publication number 20240290629
- Publication date Aug 29, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- JI CUI
- B24 - GRINDING POLISHING
Information Patent Application
Semiconductor Device and Method of Manufacture
- Publication number 20240274667
- Publication date Aug 15, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Heng-Wen Ting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CMP System and Method of Use
- Publication number 20240274440
- Publication date Aug 15, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Te-Chien Hou
- B24 - GRINDING POLISHING
Information Patent Application
ZONE-BASED CMP TARGET CONTROL
- Publication number 20240217052
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Che-Liang CHUNG
- B24 - GRINDING POLISHING
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD
- Publication number 20240217054
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shang-Yu Wang
- B24 - GRINDING POLISHING
Information Patent Application
Temperature Control in Chemical Mechanical Polish
- Publication number 20240149388
- Publication date May 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kei-Wei Chen
- B24 - GRINDING POLISHING
Information Patent Application
Semiconductor Device Structure with Interconnect Structure and Meth...
- Publication number 20240087951
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICAL CLEANING TOOL FOR WAFER POLISHING TOOL SYSTEM
- Publication number 20240050995
- Publication date Feb 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Wen Liu
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20230405756
- Publication date Dec 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Chien HOU
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEM, CONTROL METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20230390882
- Publication date Dec 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Chien Hou
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METROLOGY
- Publication number 20230381911
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih Hung CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM METROLOGY
- Publication number 20230375330
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih Hung CHEN
- G01 - MEASURING TESTING
Information Patent Application
Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen
- Publication number 20230364733
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Hsun Chang
- B24 - GRINDING POLISHING
Information Patent Application
Novel CMP Pad Design and Method of Using the Same
- Publication number 20230364734
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pin-Chuan Su
- B24 - GRINDING POLISHING
Information Patent Application
WAFER THINNING METHOD HAVING FEEDBACK CONTROL
- Publication number 20230360919
- Publication date Nov 9, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yuan-Hsuan Chen
- B24 - GRINDING POLISHING

Kei-Wei CHEN

Person

Patents Grantslast 30 patents

Metal heterojunction structure with capping metal layer

Manufacturing method of fin-type field effect transistor structure

Chemical mechanical planarization tool

Thin film metrology

Semiconductor device and method

Semiconductor structure and methods of forming same

Method for wafer backside polishing

Slurry composition, semiconductor structure and method for forming...

Electrical cleaning tool for wafer polishing tool system

Self-healing polishing pad

Semiconductor processing tool and methods of operation

Metal loss prevention using implantation

Forming gate line-end of semiconductor structures with improved met...

Fin-type field effect transistor

Mega-sonic vibration assisted chemical mechanical planarization

Chemical mechanical planarization tool

Semiconductor structure and method of forming the same

Semiconductor device and method of manufacture

Methods for chemical mechanical polishing and forming interconnect...

Method of forming a FinFET device

CMP system and method of use

Chemical mechanical polishing apparatus and method

Zone-based CMP target control

FinFET structure and method for manufacturing thereof

Temperature control in chemical mechanical polish

Magnetic slurry for highly efficiency CMP

Semiconductor device structure with interconnect structure and meth...

Semiconductor method and device

Methods to clean chemical mechanical polishing systems

Chemical mechanical polishing apparatus including a multi-zone platen

Patents Applicationslast 30 patents

RETAINING RING FOR CHEMICAL-MECHANICAL POLISHING

SYSTEM AND METHOD FOR REMOVING IMPURITIES DURING CHEMICAL MECHANICA...

PROCESSING TOOL AND METHOD

CHEMICAL MECHANICAL POLISH SLURRY AND METHOD OF MANUFACTURE

METHOD FOR WAFER BACKSIDE POLISHING

APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING

HOTSPOT AVOIDANCE METHOD OF MANUFACTURING INTEGRATED CIRCUITS

SLURRY COMPOSITION, SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING...

SEMICONDUCTOR DEVICES

ELECTRICAL CLEANING TOOL FOR WAFER POLISHING TOOL SYSTEM

SELF-HEALING POLISHING PAD

ION IMPLANT PROCESS FOR DEFECT ELIMINATION IN METAL LAYER PLANARIZA...

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

FIN-TYPE FIELD EFFECT TRANSISTOR

SEMICONDUCTOR STRUCTURE

METHODS FOR CHEMICAL MECHANICAL POLISHING AND FORMING INTERCONNECT...

Semiconductor Device and Method of Manufacture

CMP System and Method of Use

ZONE-BASED CMP TARGET CONTROL

CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD

Temperature Control in Chemical Mechanical Polish

Semiconductor Device Structure with Interconnect Structure and Meth...

ELECTRICAL CLEANING TOOL FOR WAFER POLISHING TOOL SYSTEM

APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING

SYSTEM, CONTROL METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING

POLISHING METROLOGY

THIN FILM METROLOGY

Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen

Novel CMP Pad Design and Method of Using the Same

WAFER THINNING METHOD HAVING FEEDBACK CONTROL