KEI-YU KO

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Process chamber having tunable showerhead and tunable liner
- Patent number 10,811,233
- Issue date Oct 20, 2020
- Applied Materials, Inc.
- Andrew Nguyen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESS CHAMBER HAVING TUNABLE SHOWERHEAD AND TUNABLE LINER
- Publication number 20180047544
- Publication date Feb 15, 2018
- ANDREW NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS