Keigo MAKI

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Ichikawa-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck device having focus ring
- Patent number 11,024,528
- Issue date Jun 1, 2021
- Sumitomo Osaka Cement Co., Ltd.
- Yoshiaki Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck device
- Patent number 8,284,538
- Issue date Oct 9, 2012
- Tokyo Electron Limited
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck device
- Patent number 8,264,813
- Issue date Sep 11, 2012
- Sumitomo Osaka Cement Co., Ltd.
- Hiroshi Inazumachi
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Susceptor device
- Patent number 7,678,197
- Issue date Mar 16, 2010
- Sumitomo Osaka Cement Co., Ltd.
- Keigo Maki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 7,619,870
- Issue date Nov 17, 2009
- Tokyo Electron Limited
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor with built-in electrode and manufacturing method therefor
- Patent number 6,689,984
- Issue date Feb 10, 2004
- Sumitomo Osaka Cement Co., Ltd.
- Keigo Maki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20180308737
- Publication date Oct 25, 2018
- Sumitomo Osaka Cement Co., Ltd.
- Yoshiaki MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20100002354
- Publication date Jan 7, 2010
- Hiroshi Inazumachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20080062610
- Publication date Mar 13, 2008
- Shinji HIMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20080062611
- Publication date Mar 13, 2008
- Shinji HIMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20080037195
- Publication date Feb 14, 2008
- Shinji HIMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Susceptor device
- Publication number 20050098120
- Publication date May 12, 2005
- Keigo Maki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Susceptor with built-in electrode and manufacturing method therefor
- Publication number 20030089687
- Publication date May 15, 2003
- Sumitomo Osaka Cement Co., Ltd.
- Keigo Maki
- H01 - BASIC ELECTRIC ELEMENTS