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Keigo TOYODA

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  • Miyagi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20240049379
    • Publication date Feb 8, 2024
    • TOKYO ELECTRON LIMITED
    • Yohei YAMAZAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS
    • Publication number 20230268216
    • Publication date Aug 24, 2023
    • TOKYO ELECTRON LIMITED
    • Shinya ISHIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20230021588
    • Publication date Jan 26, 2023
    • TOKYO ELECTRON LIMITED
    • Yohei YAMAZAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND GAS INTRODUCING METHOD
    • Publication number 20210166918
    • Publication date Jun 3, 2021
    • TOKYO ELECTRON LIMITED
    • Mayo UDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR PROCESSING WORKPIECE
    • Publication number 20190189493
    • Publication date Jun 20, 2019
    • TOKYO ELECTRON LIMITED
    • Shuhei OGAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190098740
    • Publication date Mar 28, 2019
    • TOKYO ELECTRON LIMITED
    • Yohei YAMAZAWA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20160372308
    • Publication date Dec 22, 2016
    • TOKYO ELECTRON LIMITED
    • Hiraku MURAKAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TEMPERATURE CONTROL METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20160365229
    • Publication date Dec 15, 2016
    • TOKYO ELECTRON LIMITED
    • Keigo TOYODA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND ETCHING APPARATUS
    • Publication number 20160079074
    • Publication date Mar 17, 2016
    • TOKYO ELECTRON LIMITED
    • Keigo TOYODA
    • H01 - BASIC ELECTRIC ELEMENTS