Keiichi Enjoji

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Device, method and program for inspecting microstructure
- Patent number 7,726,190
- Issue date Jun 1, 2010
- Tokyo Electron Limited
- Toshiyuki Matsumoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Device, Method and Program for Inspecting Microstructure
- Publication number 20080190206
- Publication date Aug 14, 2008
- TOKYO ELECTRON LIMITED
- Toshiyuki Matsumoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY