Keiichi Goto

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Gunma, JP

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Patents Grantslast 30 patents

Information Patent Grant
Silicon focus ring and method for producing the same
- Patent number 6,815,352
- Issue date Nov 9, 2004
- Shin-Etsu Chemical Co., Ltd.
- Kazuyoshi Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon electrode plate
- Patent number 6,376,977
- Issue date Apr 23, 2002
- Shin-Etsu Chemical Co., Ltd.
- Makoto Kawai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Shower plate for plasma processing apparatus and plasma processing...
- Publication number 20050258280
- Publication date Nov 24, 2005
- SHIN-ETSU CHEMICAL CO., LTD.
- Keiichi Goto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...