Keiichi IOBE

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, temperature control method of subst...
- Patent number 12,362,155
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Toshiharu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROL METHOD OF SUBST...
- Publication number 20220199377
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Toshiharu HIRATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...