TREA

Keiichi Matsushima

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processor electrode and plasma processor
    • Patent number 7,827,931
    • Issue date Nov 9, 2010
    • Tokyo Electron Limited
    • Keiichi Matsushima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Mounting/demounting device for wafer carrier lid
    • Patent number 6,984,097
    • Issue date Jan 10, 2006
    • Tokyo Electron Limited
    • Hiroaki Saeki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processing apparatus
    • Patent number 6,802,934
    • Issue date Oct 12, 2004
    • Tokyo Electron Limited
    • Hiroaki Saeki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processing system
    • Patent number 6,339,730
    • Issue date Jan 15, 2002
    • Tokyo Electron Limited
    • Keiichi Matsushima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Load port
    • Patent number 6,186,723
    • Issue date Feb 13, 2001
    • Shinko Electric Co., Ltd.
    • Masanao Murata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of sensing access positions of arm
    • Patent number 6,144,926
    • Issue date Nov 7, 2000
    • Tokyo Electron Limited
    • Shigeru Ishizawa
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Cassette transfer mechanism
    • Patent number 5,947,675
    • Issue date Sep 7, 1999
    • Tokyo Electron Limited
    • Keiichi Matsushima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Cassette transfer mechanism
    • Patent number 5,947,677
    • Issue date Sep 7, 1999
    • Tokyo Electron Limited
    • Keiichi Matsushima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Cassette chamber
    • Patent number 5,857,827
    • Issue date Jan 12, 1999
    • Tokyo Electron Limited
    • Teruo Asakawa
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma processor electrode and plasma processor
    • Publication number 20050145336
    • Publication date Jul 7, 2005
    • TOKYO ELECTRON LIMITED
    • Keiichi Matsushima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Processing apparatus
    • Publication number 20030136515
    • Publication date Jul 24, 2003
    • Hiroaki Saeki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Processing apparatus
    • Publication number 20020020355
    • Publication date Feb 21, 2002
    • Hiroaki Saeki
    • H01 - BASIC ELECTRIC ELEMENTS